GDs2Mesh

Gds2Mesh is a 3D TCAD model building tool that imports GDSII layouts and then combines predefined, customizable process rules to generate 3D device models.

0.13um CMOS NAND gate standard cell layout (left), and GDS2Mesh generated TCAD model (right)

The function is as follows:

• Inline 3D CSG engine
• Layout two-dimensional polygon stretching to generate three-dimensional structure
• GDSII file 2D polygon graphics extraction, or
• Script generation, adjustment of polygon graphics
• Boolean operations for 2D graphics and 3D volume
• Script custom process rules
• Python programming interface
• The mask defines the doping distribution area
• High quality tetrahedral mesh
• Common data format grid information export

0.13um CMOS D-Trigger Standard Cell Layout (top), and GDS2Mesh generated TCAD model (below)

The 0.13um process rule file first extracts the geometric information of each level from the layout, and then constructs the 3D geometry of the device through stretching and other geometric operations. The area of ​​the doping profile also needs to be determined based on the layout information.

The CSG engine can generate tilted STI sidewalls, sleek STI corners, beaks, and other fine structures. The mesh is automatically generated, and the mesh near the channel and the junction is refined to ensure the accuracy of the simulation. The resulting device structure can be imported directly into the Genius Execution Device emulation.