VisualFab : Process Experiment Management Platform

VisualFab is a comprehensive management platform for process simulation experiments. Its design philosophy is derived from the working methods of Fab engineers, such as process modules, batches, wafers, and batch tables. VisualFab allows users to inspect and design wafer batch experiments with a very user-friendly graphical interface.

Fab project batch and VisualFab process experiment 

VisualFab process experiment window

The function is as follows:

• Process steps can be edited in the process module
• Process steps can be grouped by level
• Process step code can be written in different emulator languages
• Support different manufacturers of simulators
• Experiments can be designed based on variables in the process module, such as annealing time and temperature
• Batch table integrates all design variables and experimental batches
• Simulation process queuing function
• No need to repeat completed simulation
• Device structure and internal variable display

Display of a set of structures (illustrated as one of the LOCOS structures)